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Summary
DescriptionLine end stochastic.png
The line end placement is vulnerable to the stochastic impact of photon shot noise. Here the rounded tip of a 24 nm line may retract or extend 2 nm due to the shot noise (within 7s limits) in the EUV photon number. Ref.: https://www.linkedin.com/pulse/photon-shot-noise-impact-line-end-placement-frederick-chen
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Guiding light
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2019-11-23 06:59:08
811 × 513
Guiding light
2019-11-23 05:43:30
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2019-11-23 05:42:26
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Guiding light
2019-11-23 05:34:01
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Guiding light
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inception
23 November 2019
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