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Deutsch: Beispiel für einen 2D-Mikroscanner vom Fraunhofer IPMS. Zu sehenen ist ein elektrostatischer 2D-Mikroscanner mit einer quasistatisch betriebenen Antriebsachse von bis zu ±8° statischer Auslenkung @ 120 V und einer resonant angetriebenen Achse mit einer nominalen Amplitude von ±9,5° @ 23,5 kHz & 160 V in einem DIL20-Gehäuse
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{{Information |Description={{de|1=Beispiel für einen 2D-Mikroscanner vom Fraunhofer IPMS. Zu sehenen ist ein elektrostatischer 2D-Mikroscanner mit einer quasistatisch betriebenen Antriebsachse von bis zu ±8° statischer Auslenkung @ 120 V und einer res
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